Design and fabrication of piezoelectric MEMS SAW pressure sensors
Introduction Micro-Electro-Mechanical Systems (MEMS) pressure sensors have increasingly become critical components in various applications, especially in environments characterized by extreme conditions such as high temperatures, strong radiation, corrosive media, and high pressures. These harsh environments are commonly found in industries such as aerospace, automotive, oil and gas, and nuclear power generation. The unique challenge presented […]
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